Elastic recoil detection analysis (ERDA), also referred to as forward recoil scattering or spectrometry, is an ion beam analysis technique, in materials science, to obtain elemental concentration depth profiles in thin films. This technique can be achieved using many processes.
Elastic recoil detection analysis (ERDA), also referred to as forward recoil scattering or spectrometry, is an ion beam analysis technique, in materials science, to obtain elemental concentration depth profiles in thin films. This technique can be achieved using many processes.
Source: Wikipedia "Elastic recoil detection" · CC BY-SA 4.0
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