Hardmask

A hardmask is a material used in semiconductor processing as an etch mask instead of a polymer or other organic "soft" resist material. Hardmasks are necessary when the material being etched is itself an organic polymer.

Source: Wikipedia — Hardmask (CC BY-SA 4.0)

Hardmask

A hardmask is a material used in semiconductor processing as an etch mask instead of a polymer or other organic "soft" resist material. Hardmasks are necessary when the material being etched is itself an organic polymer.

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Source: Wikipedia "Hardmask" · CC BY-SA 4.0

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