Immersion lithography is a technique used in semiconductor manufacturing to enhance the resolution and accuracy of the photolithographic process. It involves using a liquid medium, typically water, between the lens and the wafer during exposure.
Immersion lithography is a technique used in semiconductor manufacturing to enhance the resolution and accuracy of the photolithographic process. It involves using a liquid medium, typically water, between the lens and the wafer during exposure.
Source: Wikipedia "Immersion lithography" · CC BY-SA 4.0
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