In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication. Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.
In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication. Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.
Source: Wikipedia "Mask inspection" · CC BY-SA 4.0
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