Nanoscale secondary ion mass spectrometry

NanoSIMS (nanoscale secondary ion mass spectrometry) is an analytical instrument manufactured by CAMECA which operates on the principle of secondary ion mass spectrometry. The NanoSIMS is used to acquire nanoscale resolution measurements of the elemental and isotopic composition of a sample.

Source: Wikipedia — Nanoscale secondary ion mass spectrometry (CC BY-SA 4.0)