A microprobe is an instrument that applies a stable and well-focused beam of charged particles (electrons or ions) to a sample. == Types == When the primary beam consists of accelerated electrons, the probe is termed an electron microprobe, when the primary beam consists of accelerated ions, the term ion microprobe is used.
A microprobe is an instrument that applies a stable and well-focused beam of charged particles (electrons or ions) to a sample. == Types == When the primary beam consists of accelerated electrons, the probe is termed an electron microprobe, when the primary beam consists of accelerated ions, the term ion microprobe is used.
Source: Wikipedia "Microprobe" · CC BY-SA 4.0
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