Proton beam writing (or p-beam writing) is a direct-write lithography process that uses a focused beam of high-energy (MeV) protons to pattern resist material at nanodimensions. The process, although similar in many ways to direct writing using electrons, nevertheless offers some interesting and unique advantages.
Proton beam writing (or p-beam writing) is a direct-write lithography process that uses a focused beam of high-energy (MeV) protons to pattern resist material at nanodimensions. The process, although similar in many ways to direct writing using electrons, nevertheless offers some interesting and unique advantages.
Source: Wikipedia "Proton beam writing" · CC BY-SA 4.0
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